Spectral Interference Displacement Sensor

With KEYENCE’s spectral interference displacement sensors, it’s possible to measure absolute distance with nanometer-level resolution. Sometimes referred to as spectral interferometers, these specialized sensors are used to accurately measure distance, position, and thickness in a variety of industries.

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SI-F series - Micro-head Spectral-interference Laser Displacement Meter

Introducing the world’s first micro-head, with the highest measurement accuracy in its class and a level of performance that was previously thought impossible.

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SI-F80R series - Spectral-Interference Wafer Thickness Meter

With the adoption of the near-infrared SLD, thickness measurement for the wafer alone is possible even while BG tape is affixed. Even when there is strong pattern-based variation on the surface of the wafer, accurate in-line measurement is possible.

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