Controller IM-7501

IM-7501 - Controller

Specifications

Model				IM-7501
Type				Controller
Image sensor				1” 6.6 mega pixel monochrome CMOS
Display				10. 4” LCD monitor (XGA: 1024 × 768)
Receiver lens				Double telecentric lens
Image measurement	Field of view	Wide-field measurement mode		[IM-7010] 200 mm × 200 mm 7.87" × 7.87" (4× R50) [IM-7020] 200 mm × 200 mm 7.87" × 7.87" (4× R50) [IM-7030] 300 mm × 200 mm 11.81" × 7.87" (4× R50)
		High-precision measurement mode		[IM-7010] 125 × 125 mm 4.92" × 4.92" [IM-7020] 125 × 125 mm 4.92" × 4.92" [IM-7030] 225 × 125 mm 8.86" × 4.92"
	Minimum display unit			0.1 µm
	Repeatability	Wide-field measurement mode	W/o stage movement	±1 µm
			With stage movement	±2 µm
		High-precision measurement mode	W/o stage movement	±0.5 µm
			With stage movement	±1.5 µm
	Measurement accuracy (±2σ)	Wide-field measurement mode	W/o binding	±5 µm^*1
			With binding	[IM-7010/IM-7020] ±(7 + 0.02 L) µm^2 [IM-7030] ±(7 + 0.02 L) µm^3
		High-precision measurement mode	W/o binding	±2 µm^*4
			With binding	[IM-7010/IM-7020] ±(4 + 0.02 L) µm^5 [IM-7030] ± (4 + 0.02 L) µm^6
Light probe Measurement	Measurable area (XY)			[IM-7010] - [IM-7020] 90 × 90 mm 3.54" × 3.54" [IM-7030] 190 × 90 mm 7.48" × 3.54"
	Maximum measurement depth			[IM-7010] - [IM-7020] 30 mm 1.18" [IM-7030] 30 mm 1.18"
	Light probe diameter			[IM-7010] - [IM-7020] ø3 mm [IM-7030] ø3 mm
	Measuring force			[IM-7010] - [IM-7020] 0.015 N [IM-7030] 0.015 N
	Repeatability			[IM-7010] - [IM-7020] ±2 µm^7 [IM-7030] ±2 µm^7
	Measurement accuracy			[IM-7010] - [IM-7020] ±(8 + 0.02 L) µm^8 [IM-7030] ±(8 + 0.02 L) µm^9
External remote input				Non-voltage input (with and without contact)
External output	OK/NG/FAIL/MEAS			PhotoMos output Rated load 24 VDC 0.5 A ON resistance 50 mΩ or lower
Interface	LAN			RJ-45 (10BASE-T/100BASE-TX/1000BASE-T)
	USB 3.1			4 ports (rear: 4)
	USB 2.0 series A			2 ports (front: 2)
Record	Hard disk drive			500 GB
Illumination system	Transparent			Telecentric transparent illumination
	Ring			[IM-7010] Four division ring illumination [IM-7020] Four division, multi-angle illumination (electric) /Slit ring (directivity) illumination (electric) [IM-7030] Four division, multi-angle illumination (electric) / Slit ring (directivity) illumination (electric)
XY stage	Moving range			[IM-7010] 100 × 100 mm 3.94" × 3.94" (electric) [IM-7020] 100 × 100 mm 3.94" × 3.94" (electric) [IM-7030] 200 × 100 mm 7.87" × 3.94" (electric)
	Withstand load			[IM-7010] 5 kg [IM-7020] 5 kg [IM-7030] 7.5 kg
Z stage	Moving range			75 mm 2.95" (electric)
Power supply	Power voltage			100–240 VAC, 50/60 Hz
	Power consumption			430 VA or lower
Environmental resistance	Ambient temperature			+10°C to 35°C +50°F to 95°F
	Relative humidity			20% RH to 80% RH (no condensation)
Weight				Controller: Approx. 8 kg Head: Approx. 30 kg (IM-7010), Approx. 31 kg (IM-7020), Approx. 33 kg (IM-7030)
^1 In the range of ø80 mm ø3.15", within the operating ambient temperature range of +23°C ±1°C +73.4°F ± 1.8°F at the focused focal point position ^2 In the range of 180 × 180 mm 7.09" × 7.09" (4× R40), within the operating ambient temperature range of +23°C ±1°C +73.4°F ± 1.8°F at the focused focal point position, and with a load weighing 2 kg or less on the stage (L = amount of stage movement in mm units) ^3 In the range of 280 × 180 mm 11.02" × 7.09" (4× R40), within the operating ambient temperature range of +23°C ±1°C +73.4°F ± 1.8°F at the focused focal point position, and with a load weighing 3 kg or less on the stage (L = amount of stage movement in mm units) ^4 In the range of ø20 mm ø0.79" within the operating ambient temperature range of +23°C ±1°C +73.4°F ± 1.8°F at the focused focal point position ^5 In the range of 120 × 120 mm 4.72" × 4.72", within the operating ambient temperature range of +23°C ±1°C +73.4°F ± 1.8°F at the focused focal point position, and with a load weighing 2 kg or less on the stage (L = amount of stage movement in mm units) ^6 In the range of 220 × 120 mm 9.45" × 4.72", within the operating ambient temperature range of +23°C ±1°C +73.4°F ± 1.8°F at the focused focal point position, and with a load weighing 3 kg or less on the stage (L = amount of stage movement in mm units) ^7 When the detection system is standard. If the detection system is at a deep position, then ±3 µm ^8 When the detection system is standard, and the ambient temperature is +23°C ±1°C +73.4°F ± 1.8°F, with a stage load weighing 2 kg or less. If the detection system is at a deep position, then ±(10 + 0.02 L) µm with L as the measurement length in mm. ^*9 When the detection system is standard, and the ambient temperature is +23°C ±1°C +73.4°F ± 1.8°F, with a stage load weighing 3 kg or less. If the detection system is at a deep position, then ±(10 + 0.02 L) µm with L as the measurement length in mm.

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